Production-proven linear motion along the port axis (Z) for sample positioning and production applications.

Comprehensive series offering true UHV performance with a vast range of flange sizes, strokes, actuation and encoder options.
Overview

The LSM is the most comprehensive series in the range, offering the largest number of flange, stroke and actuation options. CF38 and CF64 flanges within the series are supplied with tapped bolt holes as standard. Clear holes on the mounting flange are provided for the CF100 and CF150 flange options.

Actuation methods

The series can be actuated via a manual handwheel, pneumatic cylinder, DC motor or stepper motor. Each LSM can also be fitted with a digital linear scale, offering visual position indication with 10 micron resolution.

Motorised LSMs are fitted with bakeable limit and home switches, pre-wired to a single bakeable connector mounted on the frame (‘UP’ option must be selected). LSMs are compatible with UHV Design’s SADC and Stepper motor controller range.
Linear Shift Mechanisms (LSMs) provide linear motion along the port axis (Z). Typical applications include the positioning of beamline filters, adjustment of sputter sources and deposition stages through to production style applications.
UHV Design has the largest range of LSMs in the world, ranging from CF35 to CF64 and HLSMs with CF100 & CF150 flanges, up to 1m stroke, tilt & X alignment versions with manual, pneumatic and motorisation options, all available with a range of position encoders. Bakeable to 250°C, the range is supplied on CF flanges and provides true UHV performance.
The LSM is the most comprehensive series in the range, offering the largest number of flange, stroke and actuation options. All flanges within the series are supplied with tapped bolt holes as standard. Special variants with clear holes on the mounting flange can be provided for most sizes, these are labelled HLSM in the partcodes and specification tables.
Actuation methods
The series can be actuated via a manual handwheel, pneumatic cylinder, DC motor or stepper motor. Each LSM can also be fitted with a digital linear scale, offering visual position indication with 10 micron resolution.
Motorised LSMs are fitted with bakeable limit and home switches, pre-wired to a single bakeable connector mounted on the frame (‘UP’ option must be selected). LSMs are compatible with UHV Design’s SADC and Stepper motor controller range, details of which can be found in our catalogue.
Technical Datasheet
LSM & HLSM Series
Production-proven linear motion along the
port axis (Z) for sample positioning and
production applications.
Comprehensive series offering true UHV performance with a vast range of flange sizes, strokes, actuation and encoder options.
LSM KEY ADVANTAGES
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2x flange parallelism compared with conventional designs
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2x load-carrying capability compared with conventional units
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Smooth kinematic motion
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10,000 cycle lifetime guarantee
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Demountable bellows assembly
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Bakeable to 250°C
Standard Linear
Shift Mechanism

TABELLA FLANGE INFO LSM

LSM38

LSM64

HLSM 100

HLSM150