CLSM SERIES

A compact solution to linear motion along the port axis (Z). The CLSM series provides the shortest available flange-to-flange dimension, without compromising on performance or reliability.

Overview

The CLSM compact series offers the shortest flange-to-flange dimension in the range. As such, the series is offered with limited flange and stroke options.

Actuation methods

The series can be actuated via a manual handwheel, pneumatic cylinder, DC motor or Stepper motor. Each CLSM can be supplied with a digital linear scale, offering visual position indication with 10 micron resolution.

Linear Shift Mechanisms (LSMs) provide linear motion along the port axis (Z). Typical applications include the positioning of beamline filters, adjustment of sputter sources and deposition stages through to production style applications.

UHV Design has the largest range of LSMs in the world, ranging from CF35 to CF150 flanges, up to 1m stroke, tilt & X alignment versions with manual, pneumatic and motorisation options, all available with a range of position encoders. Bakeable to 250°C, the range is supplied on CF flanges and provides true UHV performance.
The CLSM compact series offers the shortest flange-to-flange dimension in the range. As such, the series is offered with limited flange and stroke options.

Technical Datasheet
CLSM Series
A compact solution to linear motion along the port axis (Z). The CLSM series provides the shortest available flange-to-flange dimension, without compromising on performance or reliability.