A compact solution to linear motion along the port axis (Z). The CLSM series provides the shortest available flange-to-flange dimension, without compromising on performance or reliability.
The CLSM compact series offers the shortest flange-to-flange dimension in the range. As such, the series is offered with limited flange and stroke options.
The series can be actuated via a manual handwheel, pneumatic cylinder, DC motor or Stepper motor. Each CLSM can be supplied with a digital linear scale, offering visual position indication with 10 micron resolution.
Linear Shift Mechanisms (LSMs) provide linear motion along the port axis (Z). Typical applications include the positioning of beamline filters, adjustment of sputter sources and deposition stages through to production style applications.