DEPOSITION STAGES

Cost-effective in-line preparation stages for 2″ & 4″ substrate preparation offering high uniformity heating to 800°C …

The EC-I series provides state-of-the-art performance for various growth and deposition techniques including MBE, sputtering …

The EC-R supports the substrate at a right-angle to the plane of the mounting flange. It can then provide continuous substrate rotation …

Glancing Angle Deposition (GLAD) is creating great interest in areas where structured three-dimensional deposition is…