Cost-effective in-line preparation stages for 2″ & 4″ substrate preparation offering high uniformity heating to 800°C with substrate rotation, height adjustment and shutter options.
The EPS series of in-line preparation stages support the substrate parallel to the mounting flange. The stationary EPS heating module provides durable and uniform heating of 2″ or 4″ substrates to 800°C with Molybdenum heat shields provided to minimise heat loss. A Type K thermocouple is provided as standard.
Manual or motorised substrate rotation to 60rpm is provided by the magenetically-coupled MagiDrive rotary drives. Eliminating unnecessary bellows and dynamic seals from the EPS ensures true UHV performance and increases reliability.
In addition to substrate rotation, the 50mm height adjustment option allows the substrate position to be optimised via manual or motorised actuation. The EPS series of preparation stages provide cost-effective and durable sample preparation capability. For higher temperature heating, DC/RF biasing or additional capabilities see the EC-I series.