The four largest MagiDrives are available in a hollow configuration, terminating with a non-rotating CF flange at the rear. This allows services to be passed through the drive or, alternatively, an additional MagiDrive to be mounted to the rear, providing a secondary axes of rotation. Up to four independent axes of rotation can be provided by combining the MD16, MD35H, MD64H and MD100H MagiDrives. This stacking capability is typically used to provide simple solutions to sophisticated manipulation requirements.
All MagiDrives are:
- Fail safe – with excess torque a MagiDrive will simply release and lock back onto the next pole avoiding possible costly damage, maintenance and downtime
- Bakeable to 250°C
HOLLOW MAGIDRIVES SERIES
MagiDrives benefit from:
- No bellows, organics or sliding seals
- True UHV performance
- High torque
- Zero backlash under low load and acceleration
- Magnetic shielding permitting use in magnetically-sensitive environments
MD40H HOLLOW RANGE
MD40H is a high-torque, medium-stiffness rotary drive. Configured with a hollow body, the MD40H has a fixed rear flange enabling a component to pass through the centre, such as a heater module, a feedthrough, a second MagiDrive rotary feedthrough or a cold lance.
MD35LB HOLLOW RANGE
MD35LB is a medium/high-torque, medium-stiffness rotary drive. The MD35LB is provided with calibrated thimble, brake and timing pulley as standard. An adjustable rear flange enables rotation of position prior to fixing. The large 27mm clear bore allows a component to pass through the centre, such as a heater module, a feedthrough or a cold lance.
MD64H HOLLOW RANGE
The MD64H MagiDrive provides high torque rotation through a high-stiffness coupling. This drive is ideally suited to platen rotation or robot type applications. The MD64H has an adjustable rear flange enabling rotation of position prior to fixing. The hollow bore allows a component to pass through the centre such as a heater module, or a second MagiDrive rotary feedthrough shaft.
The MD64LB and MD64LBM MagiDrives provide high (8 Nm) or ultra-high (40 Nm) torque rotation through a high-stiffness coupling with a large 48.5mm clear bore. This drive is ideally suited to platen rotation or robot type applications. The MD64LBM supplies higher torque with the same dimensions.
The MD100H is selected for demanding, high torque and stiffness applications where a large bore is required, such as indexing robots or providing substrate rotation. The MD100H has a 65mm clear bore which enables a component to pass through the centre, such as a heater module, cooling tubes or a second MagiDrive rotary feedthrough.
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