High precision XY stage with minimal pitch and yaw error for variable loads from 0 to 30 kg.
Minimal pitch and yaw error
The KT510-200 was designed specifically for metrology applications. The strengths of this XY stage are the minimum pitch and yaw error of less than 25 µrad over the entire travel length of 200 mm.
In short measurement paths of only 10 mm, the error will be reduced below 5 µrad.
High precise even under variable load conditions
The robust design of the KT510 allows highly precise measurements even with variable loads between 0 and 30 kg. The XY stage is driven by a motor-spindle combination consisting of a 2-phase stepper motor and a Steinmeyer ball screw with 1 mm pitch.
