Smooth kinematic linear motion along the port axis (Z) with the additional facility to tilt the travelling flange so it serves as an integrated port aligner. This makes the LSMT ideal for applications where precise alignment with a fixed point is essential.
The LSMT is based on the standard LSM series with the additional facility to tilt the moving flange by +/- 2° for final alignment, acting as an integrated port aligner. Typically used on beamlines to align diagnositcs or for ion/sputter source alignment. Adjustment is actuated via four threaded support shafts. All flanges in the series are supplied with tapped bolt holes on the base flange as standard.
Actuation methods
The series can be actuated with a manual handwheel, pneumatic cylinder, DC motor or stepper motor.
Linear Shift Mechanisms (LSMs) provide linear motion along the port axis (Z). Typical applications include the positioning of beamline filters, adjustment of sputter sources and deposition stages through to production style applications.