LSMX SERIES

Linear motion along the port axis (Z) with the additional facility to adjust the travelling flange laterally (X axis) to facilitate alignment. The travelling flange angle remains constant throughout actuation.
Overview

The LSMX is based on the standard LSM series. Where the LSMX version differs is that, in addition to the Z motion, the user has the option to adjust the X motion of the moving flange by up to +/-5mm via a manual thumb wheel.

This is useful if the user needs the flexibility to make lateral alignment adjustments to the linear shift without altering the travelling flange angle. A typical application would be the alignment of a sample holder with a sample transfer arm within the system.

Linear Shift Mechanisms (LSMs) provide linear motion along the port axis (Z). Typical applications include the positioning of beamline filters, adjustment of sputter sources and deposition stages through to production style applications.

UHV Design has the largest range of LSMs in the world, ranging from CF35 to CF150 flanges, up to 1m stroke, tilt & X alignment versions with manual, pneumatic and motorisation options, all available
with a range of position encoders. Bakeable to
250°C, the range is supplied on CF flanges and provides true UHV performance.
The LSMX is based on the standard LSM series.

Where the LSMX version differs is that, in addition
to the Z motion, the user has the option to adjust
the X motion of the moving flange by up to +/-5mm
via a manual thumb wheel.

This is useful if the user needs the flexibility to make lateral alignment adjustments to the linear shift without altering the travelling flange angle. A typical application would be the alignment of a sample holder with a sample transfer arm within the system.