Designed to protect system windows during processes such as vacuum deposition with 100% full closure option.
Utilising the magnetically coupled MagiDrive rotary feedthroughs for shutter actuation, the range can be actuated manually or pneumatically where remote control is required.
100% FULL CLOSURE ACTUATOR
The VPSFC range of viewport shutters provides 100% protection against the coating of viewports in HV and UHV deposition applications.
The range is available in either AutoClose, Pneumatic or Pneumatic with position-feedback options.
PNEUMATIC ACTUATION
Viewport shutters can also be fitted with a pneumatically actuated MagiDrive. Used in their simplest form, they could be operated remotely from a control panel or switch. For more sophisticated protection, the pneumatically-actuated MagiDrive could be interlocked to the ‘vacuum process’, such that activating a deposition source, for example, would automatically close the viewport shutter. Furthermore, for critical applications, an optional ‘feedback-switch’ assembly can be fitted to the drive to confirm to the process controller that the shutter is in the closed position.
